Problem sts SNF 2009-10-22 21:58:57: same as before

ehe at snf.stanford.edu ehe at snf.stanford.edu
Thu Oct 22 21:58:58 PDT 2009


I am measuring oxide thickness from center of platen to edge, not center of wafer to edge of same wafer. When the PECVD is in good working shape, the thickness stays within 3%; last time it slipped up to 10% it was because the shower spacer was coming lose.




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