Comment sts SNF 2009-09-18 17:01:14: STS-etch

ludwig at snf.stanford.edu ludwig at snf.stanford.edu
Fri Sep 18 17:01:14 PDT 2009


Changed the Silane bottles, ran a test wafer but the #'s came out higher then expected. (10%)
On Monday I will run another test, and check the process time, just in 
case
If you need more info, please see the log book




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