From ehe at snf.stanford.edu Thu Apr 1 13:31:53 2010 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Thu, 1 Apr 2010 13:31:53 -0700 Subject: Comment sts SNF 2010-04-01 13:31:53: running low-temp Fri. 9-10am Message-ID: I just made a 9-2pm reservation on sts pecvd for tomorrow morning - sorry for the whopper, but at least it looks like less than 24 hrs in advance no one was planning to use it anyway. Will be cleaning the chamber afterward until ~2pm. Please join in if you need to do a low-T (150C) deposition - might as well get some use out of the chamber as long as I have to spend 4+ hours cleaning it. From ajamo at snf.stanford.edu Sat Apr 10 01:51:56 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sat, 10 Apr 2010 01:51:56 -0700 Subject: Problem sts SNF 2010-04-10 01:51:55: pressure tolerance error Message-ID: could not do nitride dep. Kept getting pressure tolerance error during process countdown. tried waiting 5 minutes & then pushing "resume" but it didn't work. I was able to run an oxide program with no trouble, but could not get nitride to work. Tried many times. From jperez at snf.stanford.edu Mon Apr 12 06:03:25 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 12 Apr 2010 06:03:25 -0700 Subject: Comment sts SNF 2010-04-01 13:31:53: running low-temp Fri. 9-10am Message-ID: Complete From jperez at snf.stanford.edu Mon Apr 12 09:40:18 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 12 Apr 2010 09:40:18 -0700 Subject: Shutdown sts SNF 2010-04-12 09:40:17: N2 valve being replaced Message-ID: From jperez at snf.stanford.edu Mon Apr 12 09:58:03 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 12 Apr 2010 09:58:03 -0700 Subject: Shutdown sts SNF 2010-04-12 09:40:17: N2 valve being replaced Message-ID: Completed, OK to use From jperez at snf.stanford.edu Mon Apr 12 09:58:26 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 12 Apr 2010 09:58:26 -0700 Subject: Problem sts SNF 2010-04-10 01:51:55: pressure tolerance error Message-ID: N2 valve replaced. From jperez at snf.stanford.edu Mon Apr 12 10:00:15 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 12 Apr 2010 10:00:15 -0700 Subject: Comment sts SNF 2010-03-28 13:20:02: Vent - intermittant Message-ID: Pause of 5 seconds between F3 and F1 works. without pause will not vent. From fungus at snf.stanford.edu Thu Apr 22 11:19:46 2010 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Thu, 22 Apr 2010 11:19:46 -0700 Subject: Shutdown sts SNF 2010-04-22 11:19:46: problem with computer/purge Message-ID: Jim Hayden working on computer/purge problem. From jhaydon at snf.stanford.edu Thu Apr 22 14:23:30 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 22 Apr 2010 14:23:30 -0700 Subject: Shutdown sts SNF 2010-04-22 11:19:46: problem with computer/purge Message-ID: no problem with the computer. Vacuum valve was leaking through to chamber when in the open state. Now able to pump to 0 mtorr gauge but cylinder is now leaking through so will now hear a hiss from under the cabinet . I will fix this as soon as I can. I am not sure I can get parts for this cylinder.