Problem sts SNF 2010-04-10 01:51:55: pressure tolerance error

ajamo at snf.stanford.edu ajamo at snf.stanford.edu
Sat Apr 10 01:51:56 PDT 2010


could not do nitride dep.  Kept getting pressure tolerance error during process countdown.   tried waiting  5 minutes & then pushing "resume" but it didn't work.   I was able to run an oxide program with no trouble, but could not get nitride to work.  Tried many times.  




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