From fungus at snf.stanford.edu Tue Aug 3 10:37:00 2010 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Tue, 3 Aug 2010 10:37:00 -0700 Subject: Comment sts SNF 2010-08-03 10:36:59: no pumpdown problem Message-ID: no longer seeing pumpdown problem From jperez at snf.stanford.edu Fri Aug 6 14:21:50 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 6 Aug 2010 14:21:50 -0700 Subject: Problem sts SNF 2010-07-27 04:33:55: pumpdown problem Message-ID: For some reason this problem with the chamber not going below 15 mTorr to vent, has gone away without the asistance from the Argon toggle. Jim Haydon plans on replacing the argon valve. From mahnaz at snf.stanford.edu Wed Aug 18 10:34:36 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 18 Aug 2010 10:34:36 -0700 Subject: Comment sts SNF 2010-08-18 10:34:35: running the CLEAN Message-ID: From jrjain at snf.stanford.edu Sun Aug 29 18:56:28 2010 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Sun, 29 Aug 2010 18:56:28 -0700 Subject: Problem sts SNF 2010-08-29 18:56:26: Silane Error Message-ID: Got silane error during run. Plasma turned off and SiH4 flow kept dropping. From damodei at snf.stanford.edu Mon Aug 30 06:22:14 2010 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Mon, 30 Aug 2010 06:22:14 -0700 Subject: Problem sts SNF 2010-08-30 06:22:14: silane error again Message-ID: I too am getting a silane error. From jperez at snf.stanford.edu Mon Aug 30 07:22:35 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 30 Aug 2010 07:22:35 -0700 Subject: Comment sts SNF 2010-08-18 10:34:35: running the CLEAN Message-ID: completed. From jperez at snf.stanford.edu Mon Aug 30 13:44:52 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 30 Aug 2010 13:44:52 -0700 Subject: Problem sts SNF 2010-08-30 06:22:14: silane error again Message-ID: Replaced Silane bottle. Tests good, OK to use. From jperez at snf.stanford.edu Mon Aug 30 13:45:31 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 30 Aug 2010 13:45:31 -0700 Subject: Problem sts SNF 2010-08-29 18:56:26: Silane Error Message-ID: Changed bottle, Tests good, OK to use. From jperez at snf.stanford.edu Mon Aug 30 14:05:46 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 30 Aug 2010 14:05:46 -0700 Subject: Comment sts SNF 2010-08-03 10:36:59: no pumpdown problem Message-ID: The problem has not repeated itself. From jperez at snf.stanford.edu Mon Aug 30 14:06:27 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 30 Aug 2010 14:06:27 -0700 Subject: Comment sts SNF 2010-06-10 08:46:44: New Low Freq. test after gases were turned on Message-ID: New test done 8/30/10 From jperez at snf.stanford.edu Mon Aug 30 14:26:37 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 30 Aug 2010 14:26:37 -0700 Subject: Comment sts SNF 2010-08-30 14:26:36: After bottle Change (2% Silane) Message-ID: Ran two test wafers using std_1kni. Both TWs gave me the same results 90 A/ min deposition rate. Index of refraction 1.95. Decided to run another nitride test because the previous user log wasn't clear. Second nitride test was close to the first test., but close to what I am accustom of seeing. 93 A/min andindex of refraction 1.965. I did an oxide low frequency test . Results 360A/ min with IR 1.47 OK to use.