From mferrier at snf.stanford.edu Tue Feb 2 11:20:27 2010 From: mferrier at snf.stanford.edu (mferrier at snf.stanford.edu) Date: Tue, 2 Feb 2010 11:20:27 -0800 Subject: Problem sts SNF 2010-02-02 11:20:26: still can t complete cleaning pprocedure Message-ID: As Labmember amroy on jan 29th, I could not run the oxpredep recipe RF2 failure after a few minutes From jperez at snf.stanford.edu Tue Feb 2 13:32:31 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 2 Feb 2010 13:32:31 -0800 Subject: Shutdown sts SNF 2010-02-02 13:32:31: Lower frequency power supply isn't working Message-ID: When getting errors Like the RF2 error, always abort because gases are still flowing if you leaving it running. From jhaydon at snf.stanford.edu Wed Feb 3 13:33:41 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 3 Feb 2010 13:33:41 -0800 Subject: Shutdown sts SNF 2010-02-02 13:32:31: Lower frequency power supply isn't working Message-ID: replaced blown fuse From jhaydon at snf.stanford.edu Wed Feb 3 13:33:57 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 3 Feb 2010 13:33:57 -0800 Subject: Problem sts SNF 2010-02-02 11:20:26: still can t complete cleaning pprocedure Message-ID: replaced blown fuse From jhaydon at snf.stanford.edu Wed Feb 3 13:34:41 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 3 Feb 2010 13:34:41 -0800 Subject: Problem sts SNF 2010-01-29 20:28:04: sts clean could not be completed Message-ID: replaced blown fuse in low frequency power supply From jhaydon at snf.stanford.edu Wed Feb 3 13:36:02 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 3 Feb 2010 13:36:02 -0800 Subject: Comment sts SNF 2010-02-03 13:36:01: clean cycle still needs to be completed it currently finnishing wall clean Message-ID: From jperez at snf.stanford.edu Mon Feb 8 08:12:10 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 8 Feb 2010 08:12:10 -0800 Subject: Shutdown sts SNF 2010-02-08 08:12:09: Glass plate behind shower head is broken Message-ID: From jperez at snf.stanford.edu Mon Feb 8 16:28:22 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 8 Feb 2010 16:28:22 -0800 Subject: Shutdown sts SNF 2010-02-08 08:12:09: Glass plate behind shower head is broken Message-ID: Replaced quartzware with another plate. Test results for low Freq. were good. From jperez at snf.stanford.edu Mon Feb 8 16:29:37 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 8 Feb 2010 16:29:37 -0800 Subject: Comment sts SNF 2010-02-03 13:36:01: clean cycle still needs to be completed it currently finnishing wall clean Message-ID: Clean was completed. Recleaned the system after broke quartzware was replaced. From jperez at snf.stanford.edu Mon Feb 8 16:30:26 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 8 Feb 2010 16:30:26 -0800 Subject: Comment sts SNF 2010-01-28 10:35:47: today's LF Oxide test was 370A./min 1.47 index of refraction Message-ID: New test done after replacing quartzware and after full cleaning cycle. From jperez at snf.stanford.edu Mon Feb 8 16:34:30 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 8 Feb 2010 16:34:30 -0800 Subject: Comment sts SNF 2010-02-08 16:34:30: New Test Results for Low Frequency Message-ID: If running nitride or high frequency please test system. Dep rate for low refrequency is slightly higher. Four tw load front TW 381A/ min. index on all four TW's 1.47 back TW 383A,/min Right side TW 386A/min Left side TW 375A/min From jperez at snf.stanford.edu Tue Feb 9 10:48:46 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 9 Feb 2010 10:48:46 -0800 Subject: Comment sts SNF 2010-02-09 10:48:45: Nitride TW dep. rate is 96.7A/min with replacement quartzware Message-ID: From faridz at snf.stanford.edu Wed Feb 10 08:09:06 2010 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Wed, 10 Feb 2010 08:09:06 -0800 Subject: Problem sts SNF 2010-02-10 08:09:05: failed to pump down chamber Message-ID: From faridz at snf.stanford.edu Wed Feb 10 08:09:55 2010 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Wed, 10 Feb 2010 08:09:55 -0800 Subject: Shutdown sts SNF 2010-02-10 08:09:55: unable to run Message-ID: failed to pump down the chamber unable to run any wafers. From maurice at snf.stanford.edu Wed Feb 10 08:27:53 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 10 Feb 2010 08:27:53 -0800 Subject: Shutdown sts SNF 2010-02-10 08:09:55: unable to run Message-ID: user cleaned oring From maurice at snf.stanford.edu Wed Feb 10 08:28:14 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 10 Feb 2010 08:28:14 -0800 Subject: Problem sts SNF 2010-02-10 08:09:05: failed to pump down chamber Message-ID: user cleaned oring From rostam at snf.stanford.edu Mon Feb 15 20:54:15 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Mon, 15 Feb 2010 20:54:15 -0800 Subject: Problem sts SNF 2010-02-15 20:54:14: please fix the n2 gun (the one hanging to one side of metalica) Message-ID: From jperez at snf.stanford.edu Fri Feb 19 09:44:26 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 19 Feb 2010 09:44:26 -0800 Subject: Problem sts SNF 2010-02-15 20:54:14: please fix the n2 gun (the one hanging to one side of metalica) Message-ID: Replaced old N2 gun with a new one. From ywidjaja at snf.stanford.edu Sat Feb 20 03:16:56 2010 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Sat, 20 Feb 2010 03:16:56 -0800 Subject: Problem sts SNF 2010-02-20 03:16:56: Freon-14 gas flow error Message-ID: Was running etchbak2 process (for the semi-clean process cleaning procedure) when encountered Freon-14 gas flow error. From mtang at snf.stanford.edu Sun Feb 21 05:22:19 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 21 Feb 2010 05:22:19 -0800 Subject: Problem sts SNF 2010-02-21 05:22:19: No CF4 Message-ID: Cylinder is empty and needs replacement. From jperez at snf.stanford.edu Tue Feb 23 05:53:12 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 23 Feb 2010 05:53:12 -0800 Subject: Problem sts SNF 2010-02-21 05:22:19: No CF4 Message-ID: Bottle replaced. Restarted clean cycle. From jperez at snf.stanford.edu Tue Feb 23 05:53:44 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 23 Feb 2010 05:53:44 -0800 Subject: Problem sts SNF 2010-02-20 03:16:56: Freon-14 gas flow error Message-ID: Empty CF4 bottle replaced.