Comment sts SNF 2010-02-08 16:34:30: New Test Results for Low Frequency

jperez at snf.stanford.edu jperez at snf.stanford.edu
Mon Feb 8 16:34:30 PST 2010

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If running nitride or high frequency please test system. Dep rate for
low refrequency is slightly higher.  Four tw load
front TW 381A/ min.  index on all four TW's 1.47
back TW 383A,/min
Right side TW 386A/min
Left side TW 375A/min

Previous message: Comment sts SNF 2010-01-28 10:35:47: today's LF Oxide test was 370A./min 1.47 index of refraction
Next message: Comment sts SNF 2010-02-09 10:48:45: Nitride TW dep. rate is 96.7A/min with replacement quartzware
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