Problem sts SNF 2010-02-20 03:16:56: Freon-14 gas flow error

ywidjaja at snf.stanford.edu ywidjaja at snf.stanford.edu
Sat Feb 20 03:16:56 PST 2010


Was running etchbak2 process (for the semi-clean process cleaning procedure) when encountered Freon-14 gas flow error.




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