From jperez at snf.stanford.edu Tue Jan 5 08:00:45 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 5 Jan 2010 08:00:45 -0800 Subject: Shutdown sts SNF 2010-01-05 08:00:44: Nitrious Oxide not flowing Message-ID: From jperez at snf.stanford.edu Tue Jan 5 15:50:48 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 5 Jan 2010 15:50:48 -0800 Subject: Shutdown sts SNF 2010-01-05 08:00:44: Nitrious Oxide not flowing Message-ID: Leak check with new bottle and all OK. Test qual nitride recipe using both frequencies and nitride test was good. Particles when lifting the lid, so I've started another clean cycle since we had problem with gases coming back on. From jperez at snf.stanford.edu Tue Jan 5 15:55:12 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 5 Jan 2010 15:55:12 -0800 Subject: Comment sts SNF 2010-01-05 15:55:11: Qual test with nitride good Message-ID: Ran four test wafers, front , left side, back and right side Results; avg on F 931, LS 931, B 965, RS 944A per minute. Index of refraction 1.978. Range across the wafers <5% From jhaydon at snf.stanford.edu Wed Jan 6 08:44:39 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 6 Jan 2010 08:44:39 -0800 Subject: Problem sts SNF 2009-12-11 20:57:12: pb during cleaning Message-ID: From svo at snf.stanford.edu Sun Jan 17 10:58:44 2010 From: svo at snf.stanford.edu (svo at snf.stanford.edu) Date: Sun, 17 Jan 2010 10:58:44 -0800 Subject: Comment sts SNF 2010-01-17 10:58:43: count down time does not appear properly Message-ID: From faridz at snf.stanford.edu Thu Jan 21 12:57:07 2010 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Thu, 21 Jan 2010 12:57:07 -0800 Subject: Shutdown sts SNF 2010-01-21 12:57:06: system Error Message-ID: "System Error" Purge gas flow fault. Unabble to purge gas each time given out same error. Before this error we had a problem with Silane flow error. From jperez at snf.stanford.edu Thu Jan 21 13:45:36 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 21 Jan 2010 13:45:36 -0800 Subject: Shutdown sts SNF 2010-01-21 12:57:06: system Error Message-ID: The wrong toggle when switching silane gas tanks was switched. System now OK to use. From jperez at snf.stanford.edu Thu Jan 21 13:47:39 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 21 Jan 2010 13:47:39 -0800 Subject: Comment sts SNF 2010-01-17 10:58:43: count down time does not appear properly Message-ID: Recipe time clock does work even if the outer clock gets stuck.. OK to use. From jperez at snf.stanford.edu Thu Jan 28 10:33:56 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 28 Jan 2010 10:33:56 -0800 Subject: Comment sts SNF 2010-01-05 15:55:11: Qual test with nitride good Message-ID: The nitride ERs didn't have the dismal, so this is the ER for the four test wafers run 1/05/10 93.1A/min. 1.97' index of refraction 96.5A/min 1.97 " " 93.1A/min 1.97 " " 94.4A/min 1.97 " " From jperez at snf.stanford.edu Thu Jan 28 10:35:48 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 28 Jan 2010 10:35:48 -0800 Subject: Comment sts SNF 2010-01-28 10:35:47: today's LF Oxide test was 370A./min 1.47 index of refraction Message-ID: From amroy at snf.stanford.edu Fri Jan 29 20:28:05 2010 From: amroy at snf.stanford.edu (amroy at snf.stanford.edu) Date: Fri, 29 Jan 2010 20:28:05 -0800 Subject: Problem sts SNF 2010-01-29 20:28:04: sts clean could not be completed Message-ID: RF2 power error reported during oxpredep step so could not complete the deposition.