Shutdown sts SNF 2010-01-05 08:00:44: Nitrious Oxide not flowing

jperez at snf.stanford.edu jperez at snf.stanford.edu
Tue Jan 5 15:50:48 PST 2010


Leak check with new bottle and all OK. Test qual nitride recipe using
both frequencies and nitride test was good. Particles when lifting
the lid, so I've started another clean cycle since we had problem with
gases coming back on.




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