Comment sts SNF 2010-01-05 15:55:11: Qual test with nitride good

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Jan 28 10:33:56 PST 2010


The nitride ERs didn't have the dismal, so this is the ER for the
four test wafers run 1/05/10
93.1A/min. 1.97' index of  refraction
96.5A/min  1.97   "                 "
93.1A/min  1.97   "                 "
94.4A/min   1.97   "                 "




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