From jperez at snf.stanford.edu Thu Jul 15 07:21:54 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 15 Jul 2010 07:21:54 -0700 Subject: Comment sts SNF 2010-06-26 18:10:11: Clean cycle started Message-ID: completed. From jperez at snf.stanford.edu Thu Jul 15 07:22:45 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 15 Jul 2010 07:22:45 -0700 Subject: Comment sts SNF 2010-06-20 16:13:24: second pair of tweezers missing Message-ID: Replaced 6/21/10 From zpatel at snf.stanford.edu Mon Jul 19 14:23:08 2010 From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu) Date: Mon, 19 Jul 2010 14:23:08 -0700 Subject: Comment sts SNF 2010-07-19 14:23:07: Thursday booking released Message-ID: From rostam at snf.stanford.edu Tue Jul 27 04:33:55 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Tue, 27 Jul 2010 04:33:55 -0700 Subject: Problem sts SNF 2010-07-27 04:33:55: pumpdown problem Message-ID: machine couldn't pump down to below 15mTorr; I cleaned the rim with IPA '''''4 TIMES''''' with no improvement. It always stopped at 24mTorr. I tried pulsing the Ar purge key for <1sec during the pumpdown and it worked; ie machine could pump down to below 15mTorr. Please take a look. I don't think pulsing Ar is a good idea. From jperez at snf.stanford.edu Tue Jul 27 15:29:39 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 27 Jul 2010 15:29:39 -0700 Subject: Comment sts SNF 2010-07-19 14:23:07: Thursday booking released Message-ID: From ehe at snf.stanford.edu Wed Jul 28 18:10:51 2010 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Wed, 28 Jul 2010 18:10:51 -0700 Subject: Problem sts SNF 2010-07-28 18:10:50: same problem as previous Message-ID: Noticed pump was very slow Sunday, barely pumping down in the allotted time; now it is necessary to pulse the Ar before the chamber can just barely pump down... needs to be fixed From ehe at snf.stanford.edu Wed Jul 28 18:40:57 2010 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Wed, 28 Jul 2010 18:40:57 -0700 Subject: Problem sts SNF 2010-07-28 18:40:56: process slower Message-ID: The oxide deposition is taking 50% longer than a few months ago. Waste of time. From jperez at snf.stanford.edu Thu Jul 29 08:03:04 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 29 Jul 2010 08:03:04 -0700 Subject: Problem sts SNF 2010-07-28 18:10:50: same problem as previous Message-ID: Do NOT use STS PEDVD until next week when the system can get fix! If you still need to use STS, you'll have to go through the hoops until Jim Haydon comes back from vacation. From jperez at snf.stanford.edu Thu Jul 29 08:16:23 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 29 Jul 2010 08:16:23 -0700 Subject: Problem sts SNF 2010-07-28 18:40:56: process slower Message-ID: I don't know what test are being done, but I've taken a test this week, last week and the week before, etc. Not one of my tests were taking 50% longer. All test results are in the log book for viewing. All log sheets have been Archived since 2001.Also available for viewing.