Problem sts SNF 2010-07-27 04:33:55: pumpdown problem

rostam at rostam at
Tue Jul 27 04:33:55 PDT 2010

machine couldn't pump down to below 15mTorr; I cleaned the rim with IPA '''''4 TIMES''''' with no improvement. It always stopped at 24mTorr. I tried pulsing the Ar purge key for <1sec during the pumpdown and it worked; ie machine could pump down to below 15mTorr. Please take a look. I don't think pulsing Ar is a good idea.

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