Problem sts SNF 2010-07-27 04:33:55: pumpdown problem

rostam at snf.stanford.edu rostam at snf.stanford.edu
Tue Jul 27 04:33:55 PDT 2010


machine couldn't pump down to below 15mTorr; I cleaned the rim with IPA '''''4 TIMES''''' with no improvement. It always stopped at 24mTorr. I tried pulsing the Ar purge key for <1sec during the pumpdown and it worked; ie machine could pump down to below 15mTorr. Please take a look. I don't think pulsing Ar is a good idea.




More information about the sts-pcs mailing list