From jperez at snf.stanford.edu  Tue Jun  1 07:01:54 2010
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 1 Jun 2010 07:01:54 -0700
Subject: Comment sts SNF 2010-05-07 16:09:50: Clean cycle initiated
Message-ID: <mailman.1249.1357938613.25857.sts-pcs@snf.stanford.edu>

Completed



From jperez at snf.stanford.edu  Mon Jun  7 07:11:13 2010
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Mon, 7 Jun 2010 07:11:13 -0700
Subject: Shutdown sts SNF 2010-06-07 07:11:12: Gases will be turned off today from 7 am until ??
Message-ID: <mailman.1250.1357938613.25857.sts-pcs@snf.stanford.edu>




From jperez at snf.stanford.edu  Tue Jun  8 09:25:06 2010
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Tue, 8 Jun 2010 09:25:06 -0700
Subject: Shutdown sts SNF 2010-06-07 07:11:12: Gases will be turned off today from 7 am until ??
Message-ID: <mailman.1251.1357938613.25857.sts-pcs@snf.stanford.edu>

Gases back on, clean cycle completed.  Ran test, but waiting for 
Woollam.



From jperez at snf.stanford.edu  Thu Jun 10 08:44:01 2010
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Thu, 10 Jun 2010 08:44:01 -0700
Subject: Comment sts SNF 2010-05-07 10:36:51: 2% silane gas bottle change.
Message-ID: <mailman.1252.1357938613.25857.sts-pcs@snf.stanford.edu>

New test after gases were turned on for new RTAs



From jperez at snf.stanford.edu  Thu Jun 10 08:46:44 2010
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Thu, 10 Jun 2010 08:46:44 -0700
Subject: Comment sts SNF 2010-06-10 08:46:44: New Low Freq. test after gases were turned on
Message-ID: <mailman.1253.1357938613.25857.sts-pcs@snf.stanford.edu>

slightly higher dep rate 404 A per minute with Low Freqa.
Uniformity great < 2% across the wafer. Index 1.475



From dkozak at snf.stanford.edu  Sun Jun 20 16:13:25 2010
From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu)
Date: Sun, 20 Jun 2010 16:13:25 -0700
Subject: Comment sts SNF 2010-06-20 16:13:24: second pair of tweezers missing
Message-ID: <mailman.1254.1357938613.25857.sts-pcs@snf.stanford.edu>

in box, only one pair of metal tweezers (no teflon).  Second pair is nowhere around.  Missing?



From jperez at snf.stanford.edu  Fri Jun 25 07:23:13 2010
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 25 Jun 2010 07:23:13 -0700
Subject: Problem sts SNF 2010-06-25 07:23:12: 2% silane bottle pressure low, switched from A toggles to Btoggles
Message-ID: <mailman.1255.1357938613.25857.sts-pcs@snf.stanford.edu>

Will  run a low frequen;cy  test.



From jperez at snf.stanford.edu  Fri Jun 25 08:04:43 2010
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 25 Jun 2010 08:04:43 -0700
Subject: Problem sts SNF 2010-06-25 07:23:12: 2% silane bottle pressure low, switched from A toggles to Btoggles
Message-ID: <mailman.1256.1357938613.25857.sts-pcs@snf.stanford.edu>

Test result good, but you should test your own processes.
LF oxide 1012, 1025, 1028, 1022, 1008, 1018, 1014, 1027, 1014=
Avg 1019A Range across the wafer 20 A.
IR 1.478 , deposition rate 370A /min.



From altamash at snf.stanford.edu  Sat Jun 26 18:10:12 2010
From: altamash at snf.stanford.edu (altamash at snf.stanford.edu)
Date: Sat, 26 Jun 2010 18:10:12 -0700
Subject: Comment sts SNF 2010-06-26 18:10:11: Clean cycle started
Message-ID: <mailman.1257.1357938613.25857.sts-pcs@snf.stanford.edu>