Comment sts SNF 2010-06-10 08:46:44: New Low Freq. test after gases were turned on

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Jun 10 08:46:44 PDT 2010


slightly higher dep rate 404 A per minute with Low Freqa.
Uniformity great < 2% across the wafer. Index 1.475




More information about the sts-pcs mailing list