Problem sts SNF 2010-06-25 07:23:12: 2% silane bottle pressure low, switched from A toggles to Btoggles

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri Jun 25 08:04:43 PDT 2010


Test result good, but you should test your own processes.
LF oxide 1012, 1025, 1028, 1022, 1008, 1018, 1014, 1027, 1014=
Avg 1019A Range across the wafer 20 A.
IR 1.478 , deposition rate 370A /min.




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