Problem sts SNF 2010-03-09 23:04:23: Con't from the previous one

sipark at snf.stanford.edu sipark at snf.stanford.edu
Tue Mar 9 23:04:24 PST 2010

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Previous user deposited SiO2, and I tried to deposit SiN but I couldn't.
In that situation, did I need to do something?
(I just wonder.)
Thanks.

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