Problem sts SNF 2010-03-10 23:08:11: There is some problem in the warm up stage

sipark at snf.stanford.edu sipark at snf.stanford.edu
Wed Mar 10 23:08:11 PST 2010


I found there is some problem in the warm up stage.
Without the warm up stage, I was able to deposit nitride.
But with warm up stage, the recipe didn't allowed me to proceed the next step with error message(it says process tolerance errorr).
One more thing, accidently I rebooted the PC.
( I don't know how to get the main menu. )
Sorry for the inconvenience.
Thanks.




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