Comment sts SNF 2010-02-09 10:48:45: Nitride TW dep. rate is 96.7A/min with replacement quartzware

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri Mar 12 09:24:28 PST 2010


Nitride test after 2% silane bottle change was great!
Avg. 982.9A Target 1000A, time 9.8min.
Dep rate was 100A/min. Thickness across the wafer was less than 4%.




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