Problem sts SNF 2010-03-15 14:49:31: Etch back 3 had to be restarted

[jperez at snf.stanford.edu]

I went to clean the walls with IPA and large flakes of film started
floating in the air. You could see film still peeling from the wall area.
System may have more film deposited then what was written down
on the log sheet.