Problem sts SNF 2010-03-15 14:49:31: Etch back 3 had to be restarted
jperez at snf.stanford.edu
jperez at snf.stanford.edu
Wed Mar 17 08:02:14 PDT 2010
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Problem sts SNF 2010-03-15 14:49:31: Etch back 3 had to be restarted
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Comment sts SNF 2010-03-28 13:20:02: Vent - intermittant
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Second etch back 3 cleaned up the remaining film.
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Problem sts SNF 2010-03-15 14:49:31: Etch back 3 had to be restarted
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Comment sts SNF 2010-03-28 13:20:02: Vent - intermittant
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