Comment sts SNF 2010-03-28 13:20:02: Vent - intermittant

ajamo at snf.stanford.edu ajamo at snf.stanford.edu
Sun Mar 28 13:20:02 PDT 2010


I did 4 deps in STS.  3 times the chamber did not vent after pushing F3(Vent) and then F1.  Screen said it was venting but after 5 min it never showed decompression and didn't open.  I went through loading program & pump down to get back to the stand by screen & was able to successfully vent & unload wafers.  




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