From ajamo at snf.stanford.edu Wed May 5 03:15:50 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Wed, 5 May 2010 03:15:50 -0700 Subject: Problem sts SNF 2010-05-05 03:15:49: Won't pump to 12mtorr Message-ID: chamber would not pump to 12mtorr, tried several times, unloaded wafers - no dep From altamash at snf.stanford.edu Wed May 5 11:09:21 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Wed, 5 May 2010 11:09:21 -0700 Subject: Shutdown sts SNF 2010-05-05 11:09:20: Chamber not pumping down Message-ID: As previous user noted the chamber does not pump down below 35mtorr and now the system is stuck in standby mode as well From jhaydon at snf.stanford.edu Wed May 5 13:30:38 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 5 May 2010 13:30:38 -0700 Subject: Shutdown sts SNF 2010-05-05 11:09:20: Chamber not pumping down Message-ID: pumping down now but the purge control is leaking by. should be ok to use From calarrudo at snf.stanford.edu Wed May 5 17:20:06 2010 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Wed, 5 May 2010 17:20:06 -0700 Subject: Problem sts SNF 2010-05-05 17:20:05: STS Deposition Message-ID: Started Etchback 3 clean, previous user burned smock on the platen. From jperez at snf.stanford.edu Fri May 7 07:02:50 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 7 May 2010 07:02:50 -0700 Subject: Problem sts SNF 2010-05-05 17:20:05: STS Deposition Message-ID: Clean completef. From jperez at snf.stanford.edu Fri May 7 07:03:34 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 7 May 2010 07:03:34 -0700 Subject: Problem sts SNF 2010-05-05 03:15:49: Won't pump to 12mtorr Message-ID: Chamber pumping down to 4 mTorr. From jperez at snf.stanford.edu Fri May 7 10:36:52 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 7 May 2010 10:36:52 -0700 Subject: Comment sts SNF 2010-05-07 10:36:51: 2% silane gas bottle change. Message-ID: Switched 2% silane gas bottle. Ran a Low Frequ;ency oxide recipe and results were good. Average thickness 1083A and 1095A (2 'TW's) index of refraction 1.47 on both wafers. Range across the wafers on both wafers. <3%. From altamash at snf.stanford.edu Fri May 7 16:09:51 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Fri, 7 May 2010 16:09:51 -0700 Subject: Comment sts SNF 2010-05-07 16:09:50: Clean cycle initiated Message-ID: