Comment sts SNF 2010-05-07 10:36:51: 2% silane gas bottle change.

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri May 7 10:36:52 PDT 2010


Switched 2% silane gas bottle. Ran a Low Frequ;ency oxide recipe and 
results were good. Average thickness 1083A and 1095A (2 'TW's)
index of refraction 1.47 on both wafers. Range across the wafers on 
both wafers.
<3%.




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