From dwnam at snf.stanford.edu Fri Nov 5 05:40:13 2010 From: dwnam at snf.stanford.edu (dwnam at snf.stanford.edu) Date: Fri, 5 Nov 2010 05:40:13 -0700 Subject: Problem sts SNF 2010-11-05 05:40:12: Saline gas flow error Message-ID: I guess the gas is out. From jperez at snf.stanford.edu Fri Nov 5 14:00:38 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 5 Nov 2010 14:00:38 -0700 Subject: Problem sts SNF 2010-11-05 05:40:12: Saline gas flow error Message-ID: The bottle pressure was low, but not out (60 psi). We switched from B to A with toggles. 2% SiH4. Running a test. From jperez at snf.stanford.edu Fri Nov 5 14:52:08 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 5 Nov 2010 14:52:08 -0700 Subject: Comment sts SNF 2010-11-05 14:52:07: Ran Nitride test after 2% bottle change Message-ID: Dep. rate a little low, but ok to use. 95.2 A/ min. From fatihs at snf.stanford.edu Fri Nov 12 03:46:32 2010 From: fatihs at snf.stanford.edu (fatihs at snf.stanford.edu) Date: Fri, 12 Nov 2010 03:46:32 -0800 Subject: Shutdown sts SNF 2010-11-12 03:46:32: Rod guard stuck Message-ID: From jhaydon at snf.stanford.edu Fri Nov 12 09:47:37 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 12 Nov 2010 09:47:37 -0800 Subject: Shutdown sts SNF 2010-11-12 03:46:32: Rod guard stuck Message-ID: rod removed system working correctly From dkozak at snf.stanford.edu Sat Nov 13 04:01:43 2010 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Sat, 13 Nov 2010 04:01:43 -0800 Subject: Problem sts SNF 2010-11-13 04:01:42: pump seems to be not working Message-ID: After one successful run, could not do any more processing -- chamber won't pump down below 120 mTorr. From dkozak at snf.stanford.edu Mon Nov 15 02:59:10 2010 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Mon, 15 Nov 2010 02:59:10 -0800 Subject: Comment sts SNF 2010-11-15 02:59:09: changed password for level Message-ID: Tried to modify my receipe -- could not get to "service" level with usual password -- tried several ones, and apparently password was changed to "blank" (as in, nothing -- just press enter when propmted) From jperez at snf.stanford.edu Fri Nov 19 11:29:22 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 19 Nov 2010 11:29:22 -0800 Subject: Comment sts SNF 2010-11-15 02:59:09: changed password for level Message-ID: Revised the STS Operating procedures when in the main menu to modify your recipe, there is no longer a password. Just press enter when ask for a password. STS no longer works. From jhaydon at snf.stanford.edu Mon Nov 22 12:44:14 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 22 Nov 2010 12:44:14 -0800 Subject: Problem sts SNF 2010-11-13 04:01:42: pump seems to be not working Message-ID: it seems to be working now could not find a problem