From jperez at snf.stanford.edu Mon Oct 4 07:16:45 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 4 Oct 2010 07:16:45 -0700 Subject: Comment sts SNF 2010-09-10 17:54:14: No record of gas flow by previous user Message-ID: spoke with previous user. From ehe at snf.stanford.edu Tue Oct 12 18:04:18 2010 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Tue, 12 Oct 2010 18:04:18 -0700 Subject: Comment sts SNF 2010-10-12 18:04:18: in clean cycle Message-ID: From jperez at snf.stanford.edu Thu Oct 14 07:04:50 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 14 Oct 2010 07:04:50 -0700 Subject: Comment sts SNF 2010-10-12 18:04:18: in clean cycle Message-ID: completed. From ehe at snf.stanford.edu Fri Oct 15 13:42:43 2010 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Fri, 15 Oct 2010 13:42:43 -0700 Subject: Comment sts SNF 2010-10-15 13:42:43: freon-14 at only 8, usually 13-14 Message-ID: From ehe at snf.stanford.edu Fri Oct 15 13:48:55 2010 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Fri, 15 Oct 2010 13:48:55 -0700 Subject: Problem sts SNF 2010-10-15 13:48:54: silane not purging effectively Message-ID: after 5-6 purge cycles stays above 2000sccm, should be dropping faster; finally had to abort purge From jperez at snf.stanford.edu Fri Oct 15 14:48:09 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 15 Oct 2010 14:48:09 -0700 Subject: Comment sts SNF 2010-10-15 13:42:43: freon-14 at only 8, usually 13-14 Message-ID: Even thou we aren't running Freon during processing and you see a reading, maintenance believes it's just a number because in the mimic page the valve is closed. In the text page there isn't a setpoint number. There has always been a number showing when we aren't flowing CF4 From jperez at snf.stanford.edu Fri Oct 15 14:51:28 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 15 Oct 2010 14:51:28 -0700 Subject: Problem sts SNF 2010-10-15 13:48:54: silane not purging effectively Message-ID: I ran the same recipe and yes at times the purge seems longer than other times, but please do not abort purges. The longer the purge the safer it is when you open the chamber that your not breathing the gases used. From altamash at snf.stanford.edu Sat Oct 16 12:58:58 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Sat, 16 Oct 2010 12:58:58 -0700 Subject: Comment sts SNF 2010-10-16 12:58:58: STS IN CLEAN CYCLE Message-ID: From ehe at snf.stanford.edu Sun Oct 17 11:20:25 2010 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sun, 17 Oct 2010 11:20:25 -0700 Subject: Comment sts SNF 2010-10-17 11:20:25: purge cycle taking 11-12 cycles on silane Message-ID: still reaching 2000sccm silane flow (full flow) on 10th purge, doesn't seem very effective From jperez at snf.stanford.edu Tue Oct 19 07:32:16 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 19 Oct 2010 07:32:16 -0700 Subject: Comment sts SNF 2010-10-17 11:20:25: purge cycle taking 11-12 cycles on silane Message-ID: The system has a pre-set number of purges for safety reasons and machine protection. Can not change or adjust. From jperez at snf.stanford.edu Tue Oct 19 07:34:38 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 19 Oct 2010 07:34:38 -0700 Subject: Comment sts SNF 2010-10-16 12:58:58: STS IN CLEAN CYCLE Message-ID: Was completed. From jperez at snf.stanford.edu Mon Oct 25 07:46:35 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 25 Oct 2010 07:46:35 -0700 Subject: Problem sts SNF 2010-10-25 07:46:34: Gas bottle change under leak check Message-ID: From jperez at snf.stanford.edu Mon Oct 25 08:05:34 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 25 Oct 2010 08:05:34 -0700 Subject: Shutdown sts SNF 2010-10-25 08:05:34: Nitrus oxide bottle under leak check Message-ID: From jperez at snf.stanford.edu Mon Oct 25 11:49:50 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 25 Oct 2010 11:49:50 -0700 Subject: Shutdown sts SNF 2010-10-25 08:05:34: Nitrus oxide bottle under leak check Message-ID: leak check complete, OK to use From jperez at snf.stanford.edu Mon Oct 25 11:55:39 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 25 Oct 2010 11:55:39 -0700 Subject: Problem sts SNF 2010-10-25 07:46:34: Gas bottle change under leak check Message-ID: Ran recipe and watched nitrus oxide flow run for five minutes. OK to use. Did not run a test wafer.