Problem sts SNF 2010-10-15 13:48:54: silane not purging effectively

ehe at snf.stanford.edu ehe at snf.stanford.edu
Fri Oct 15 13:48:55 PDT 2010


after 5-6 purge cycles stays above 2000sccm, should be dropping faster; finally had to abort purge




More information about the sts-pcs mailing list