Problem sts SNF 2010-10-15 13:48:54: silane not purging effectively

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri Oct 15 14:51:28 PDT 2010


I ran the same recipe and yes at times the purge seems longer than
other times, but please do not abort purges. The longer the purge the
safer it is when you open the chamber that your not breathing the
gases used.




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