From zpatel at snf.stanford.edu  Fri Sep 10 17:54:14 2010
From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu)
Date: Fri, 10 Sep 2010 17:54:14 -0700
Subject: Comment sts SNF 2010-09-10 17:54:14: No record of gas flow by previous user
Message-ID: <mailman.1278.1357938613.25857.sts-pcs@snf.stanford.edu>

No gas flows recorded by previous user
Handwriting not readeable



From sabrinali at snf.stanford.edu  Fri Sep 17 18:13:29 2010
From: sabrinali at snf.stanford.edu (sabrinali at snf.stanford.edu)
Date: Fri, 17 Sep 2010 18:13:29 -0700
Subject: Comment sts SNF 2010-09-17 18:13:28: PECVD sts vent has problem
Message-ID: <mailman.1279.1357938613.25857.sts-pcs@snf.stanford.edu>

PECVD  sts  chamber venting has problem,  sometimes you can vent it, sometimes you can not vent it.



From sabrinali at snf.stanford.edu  Fri Sep 17 18:14:19 2010
From: sabrinali at snf.stanford.edu (sabrinali at snf.stanford.edu)
Date: Fri, 17 Sep 2010 18:14:19 -0700
Subject: Comment sts SNF 2010-09-17 18:14:18: 
Message-ID: <mailman.1280.1357938613.25857.sts-pcs@snf.stanford.edu>

sts has problem



From carterlin at snf.stanford.edu  Sun Sep 19 18:58:38 2010
From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu)
Date: Sun, 19 Sep 2010 18:58:38 -0700
Subject: Problem sts SNF 2010-09-19 18:58:37: system error
Message-ID: <mailman.1281.1357938613.25857.sts-pcs@snf.stanford.edu>

module serial communication fault. Option is F1 - shutdown. Last user seems to be amroy on Sat. No record on Sun. No error reported. "In use" sign is on. 



From jhaydon at snf.stanford.edu  Mon Sep 20 07:53:03 2010
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Mon, 20 Sep 2010 07:53:03 -0700
Subject: Problem sts SNF 2010-09-19 18:58:37: system error
Message-ID: <mailman.1282.1357938613.25857.sts-pcs@snf.stanford.edu>

keyboard was disconnected



From jperez at snf.stanford.edu  Mon Sep 20 08:06:13 2010
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Mon, 20 Sep 2010 08:06:13 -0700
Subject: Comment sts SNF 2010-09-17 18:14:18: 
Message-ID: <mailman.1283.1357938613.25857.sts-pcs@snf.stanford.edu>

Need information on what the problem is to be able to fix.



From jperez at snf.stanford.edu  Mon Sep 20 08:08:27 2010
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Mon, 20 Sep 2010 08:08:27 -0700
Subject: Comment sts SNF 2010-09-17 18:13:28: PECVD sts vent has problem
Message-ID: <mailman.1284.1357938613.25857.sts-pcs@snf.stanford.edu>

Software slow, need to pause for about 3 second after pressing
F3. Once you've paued for three seconds and can press F1 "open
valve".



From jperez at snf.stanford.edu  Thu Sep 30 13:41:24 2010
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Thu, 30 Sep 2010 13:41:24 -0700
Subject: Comment sts SNF 2010-08-30 14:26:36: After bottle Change (2% Silane)
Message-ID: <mailman.1285.1357938613.25857.sts-pcs@snf.stanford.edu>

Today I switched the toggles for 2% silane bottle and I ran a nitride test, using two test wafers. One towards the back and the other one 
towards the  front of the platen. Both test wafers good
Dep. rate for nitride on back wafer was 99A / minute and front t.w. 
was 98A/ minute. Index of refraction was 1.97. Uniformity was 3%
across the wafers.