From sghanbari at snf.stanford.edu Sun Apr 10 08:30:18 2011 From: sghanbari at snf.stanford.edu (sghanbari at snf.stanford.edu) Date: Sun, 10 Apr 2011 08:30:18 -0700 Subject: Problem sts SNF 2011-04-10 08:30:17: standby purge Message-ID: when I try to do my process it goes to standby purge and says pumpdown time exceeded From jperez at snf.stanford.edu Thu Apr 14 07:29:37 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 14 Apr 2011 07:29:37 -0700 Subject: Problem sts SNF 2011-04-10 08:30:17: standby purge Message-ID: Not sure what happen. When I tried using STS is worked fine and no other complaints. We needed more information. From tkodama at snf.stanford.edu Sun Apr 17 05:20:55 2011 From: tkodama at snf.stanford.edu (tkodama at snf.stanford.edu) Date: Sun, 17 Apr 2011 05:20:55 -0700 Subject: Problem sts SNF 2011-04-17 05:20:54: RF2 power error Message-ID: RF2 power tolerance error was appeared and stopped the process. I could not restart the RF power source. From zzp at snf.stanford.edu Sun Apr 17 11:43:06 2011 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Sun, 17 Apr 2011 11:43:06 -0700 Subject: Problem sts SNF 2011-04-17 11:43:06: system error once during my run Message-ID: occurred after recipe loaded and 'deposit' pressed, but after shut down and restart, back to normal again. From jperez at snf.stanford.edu Mon Apr 18 11:16:40 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 18 Apr 2011 11:16:40 -0700 Subject: Problem sts SNF 2011-04-17 11:43:06: system error once during my run Message-ID: Not enough information to what was being done at the time of the error. From jperez at snf.stanford.edu Mon Apr 18 11:19:11 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 18 Apr 2011 11:19:11 -0700 Subject: Problem sts SNF 2011-04-18 11:19:11: Low Frequency isn't working, so no NITRIDES to be ran Message-ID: At this time you can only run HIGH frequency oxides. From pnataraj at snf.stanford.edu Wed Apr 20 14:40:54 2011 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Wed, 20 Apr 2011 14:40:54 -0700 Subject: Comment sts SNF 2011-04-20 14:40:53: SYSTEM DOWN Message-ID: System is off to fix the problem. Jim is working on it From jhaydon at snf.stanford.edu Wed Apr 20 15:39:35 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 20 Apr 2011 15:39:35 -0700 Subject: Problem sts SNF 2011-04-20 15:39:35: low frequency problem Message-ID: The problem appears to be the contactor that provides power to the the low frequency power supply This is an old unit and may take some time to find a replacement. Expect at least a week or so. From suyog at snf.stanford.edu Wed Apr 20 23:17:29 2011 From: suyog at snf.stanford.edu (suyog at snf.stanford.edu) Date: Wed, 20 Apr 2011 23:17:29 -0700 Subject: Problem sts SNF 2011-04-20 23:17:28: Clean cycle aborted Message-ID: etchback3 recipe aborted with error message " RF Tolerance Error". From jperez at snf.stanford.edu Thu Apr 21 07:47:11 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 21 Apr 2011 07:47:11 -0700 Subject: Shutdown sts SNF 2011-04-21 07:47:10: Can NOT Clean (ETCHBak3) due to low freq. Message-ID: