From ehe at snf.stanford.edu  Sat Dec  3 15:03:55 2011
From: ehe at snf.stanford.edu (ehe at snf.stanford.edu)
Date: Sat, 3 Dec 2011 15:03:55 -0800
Subject: Problem sts SNF 2011-12-03 15:03:54: n20 flow deviation during oxpredep
Message-ID: <mailman.1428.1357938615.25857.sts-pcs@snf.stanford.edu>

Nitrous flow was erratic and kicked out of oxpredep program. Seemed otherwise low all day



From jperez at snf.stanford.edu  Mon Dec  5 11:53:21 2011
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Mon, 5 Dec 2011 11:53:21 -0800
Subject: Problem sts SNF 2011-12-03 15:03:54: n20 flow deviation during oxpredep
Message-ID: <mailman.1429.1357938615.25857.sts-pcs@snf.stanford.edu>

We ran same recipe as User that put down problem. The MFC during
a 3 minute process only flucuated no more then 1% of set-point (1400sccm). May have a bad regular at bottle.  Maint. will keep an eye on it.
At the tool everything went well.



From jhaydon at snf.stanford.edu  Sat Dec 10 23:13:26 2011
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Sat, 10 Dec 2011 23:13:26 -0800
Subject: Shutdown sts SNF 2011-12-10 23:13:26: pcw problem
Message-ID: <mailman.1430.1357938615.25857.sts-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Sun Dec 11 10:45:51 2011
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Sun, 11 Dec 2011 10:45:51 -0800
Subject: Shutdown sts SNF 2011-12-10 23:13:26: pcw problem
Message-ID: <mailman.1431.1357938615.25857.sts-pcs@snf.stanford.edu>

pcw back on



From jperez at snf.stanford.edu  Mon Dec 12 08:20:10 2011
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Mon, 12 Dec 2011 08:20:10 -0800
Subject: Shutdown sts SNF 2011-12-12 08:20:10: READY TO PURGE GASES,
Message-ID: <mailman.1432.1357938615.25857.sts-pcs@snf.stanford.edu>




From jperez at snf.stanford.edu  Wed Dec 14 09:21:41 2011
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Wed, 14 Dec 2011 09:21:41 -0800
Subject: Comment sts SNF 2011-02-18 10:01:01: Nitride t.w.  a little thickner then normal, OK to use
Message-ID: <mailman.1433.1357938615.25857.sts-pcs@snf.stanford.edu>

System  down for shutdown and new data when bring up next year.



From jperez at snf.stanford.edu  Wed Dec 14 09:22:42 2011
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Wed, 14 Dec 2011 09:22:42 -0800
Subject: Comment sts SNF 2011-11-04 09:57:59: Dep rate after bottle change was lower than normal
Message-ID: <mailman.1434.1357938615.25857.sts-pcs@snf.stanford.edu>

System shut down for the rest of the year.