Problem sts SNF 2011-02-17 14:54:19: Gas line purge

[jperez at snf.stanford.edu]

After processing, the gas line purge when done, actual flow 2% siliane
doesn't go down to zero. The actual flow moves from 24 to 26. Because
of this the gas line purge doesn't end its' cycle, I have to press F1 to
abort.