Comment sts SNF 2011-02-18 10:01:01: Nitride t.w. a little thickner then normal, OK to use
jperez at snf.stanford.edu
jperez at snf.stanford.edu
Fri Feb 18 10:01:01 PST 2011
Thickness avg. 1125A (11 min dep). Index of refraction 1.976,
5% range across the test wafer.
More information about the sts-pcs
mailing list