From jperez at snf.stanford.edu Tue Jan 4 10:00:19 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 4 Jan 2011 10:00:19 -0800 Subject: Comment sts SNF 2010-11-05 14:52:07: Ran Nitride test after 2% bottle change Message-ID: RAN NEW NITRIDE TEST AFTER SHUT DOWN. OK TO USE From jperez at snf.stanford.edu Tue Jan 4 10:01:21 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 4 Jan 2011 10:01:21 -0800 Subject: Comment sts SNF 2011-01-04 10:01:20: NITRIDE TEST GOOD, DEP RATE ~99A/MIN Message-ID: From jperez at snf.stanford.edu Tue Jan 4 10:03:08 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 4 Jan 2011 10:03:08 -0800 Subject: Comment sts SNF 2011-01-04 10:03:08: LOW FREQ. AND HIGH FREQ OXIDE TEST GOOD Message-ID: LF OXIDE DEP. RATE 378A/MIN HF OXIDE DEP RATER 361A/MIN From jperez at snf.stanford.edu Fri Jan 7 14:58:40 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 7 Jan 2011 14:58:40 -0800 Subject: Problem sts SNF 2011-01-07 14:58:39: System stalling and only option is F1 ABORT Message-ID: To get it to work again, press F1 "abort" Vent system (F3 pause F1). Lift lid slightly and make sure it's centered on both sides of the table and lower lid down. It should work and you may have to do this every load. Jim will look at it on Monday. From faridz at snf.stanford.edu Tue Jan 11 12:15:34 2011 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Tue, 11 Jan 2011 12:15:34 -0800 Subject: Problem sts SNF 2011-01-11 12:15:34: Systen staliing Message-ID: Unable to deposit, still have pumpdown time exceded error, I tried Jeaney's procedure 3 times but, i'm having same error each time. From jhaydon at snf.stanford.edu Wed Jan 12 12:26:47 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 12 Jan 2011 12:26:47 -0800 Subject: Problem sts SNF 2011-01-11 12:15:34: Systen staliing Message-ID: pneumatic cylinder fixed for now I will see if I can find the correct seal From dongrip at snf.stanford.edu Sun Jan 16 23:28:28 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sun, 16 Jan 2011 23:28:28 -0800 Subject: Problem sts SNF 2011-01-16 23:28:27: pressure error and ammonia flow error Message-ID: I ran nitpredep program, and before the nitride deposition, there is 15 min warm-up step. During the warm-up step, pressure error occurred, and even in the nitride dep step, ammonia flow error occurred. I aborted the process. From jperez at snf.stanford.edu Tue Jan 18 09:20:17 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 18 Jan 2011 09:20:17 -0800 Subject: Problem sts SNF 2011-01-18 09:20:17: No Ammonia flow. Message-ID: From seymour at snf.stanford.edu Wed Jan 19 07:37:39 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 19 Jan 2011 07:37:39 -0800 Subject: Problem sts SNF 2011-01-18 09:20:17: No Ammonia flow. Message-ID: delivery panel valve in off position, on now. From jhaydon at snf.stanford.edu Wed Jan 19 07:51:02 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 19 Jan 2011 07:51:02 -0800 Subject: Problem sts SNF 2011-01-16 23:28:27: pressure error and ammonia flow error Message-ID: ammonia flow has been corrected. The bottle had been turned off probably since shut down and I had mistakenly thouhgt it was opened but miss read the valve position. From jhaydon at snf.stanford.edu Wed Jan 19 07:53:24 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 19 Jan 2011 07:53:24 -0800 Subject: Problem sts SNF 2011-01-07 14:58:39: System stalling and only option is F1 ABORT Message-ID: I have made a temporay repair on the pneumatic cylinder on the vacuum valve From jperez at snf.stanford.edu Tue Jan 25 07:33:35 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 25 Jan 2011 07:33:35 -0800 Subject: Comment sts SNF 2010-12-15 14:55:30: 1 pair tweezers missing Message-ID: Replaced tweezer. From elibol at snf.stanford.edu Wed Jan 26 10:51:59 2011 From: elibol at snf.stanford.edu (elibol at snf.stanford.edu) Date: Wed, 26 Jan 2011 10:51:59 -0800 Subject: Comment sts SNF 2011-01-26 10:51:59: Ar purge was found off Message-ID: