Problem sts SNF 2011-01-16 23:28:27: pressure error and ammonia flow error

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Sun Jan 16 23:28:28 PST 2011


I ran nitpredep program, and before the nitride deposition, there is 15 min warm-up step. During the warm-up step, pressure error occurred, and even in the nitride dep step, ammonia flow error occurred. I aborted the process. 




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