From vijayn at snf.stanford.edu Fri Jul 1 09:22:33 2011 From: vijayn at snf.stanford.edu (vijayn at snf.stanford.edu) Date: Fri, 1 Jul 2011 09:22:33 -0700 Subject: Comment sts SNF 2011-07-01 09:22:32: Base Pressure Message-ID: Steady at 16 rather than 15 From paik at snf.stanford.edu Fri Jul 1 12:57:15 2011 From: paik at snf.stanford.edu (paik at snf.stanford.edu) Date: Fri, 1 Jul 2011 12:57:15 -0700 Subject: Problem sts SNF 2011-07-01 12:57:14: system won't go to standby Message-ID: process run was fine system won't start the standby pumpdown even with the green light on. From paik at snf.stanford.edu Fri Jul 1 13:02:56 2011 From: paik at snf.stanford.edu (paik at snf.stanford.edu) Date: Fri, 1 Jul 2011 13:02:56 -0700 Subject: Problem sts SNF 2011-07-01 13:02:56: Ignore my previous problem its for Drytek4 Message-ID: Ignore my previous problem its for Drytek4 From jperez at snf.stanford.edu Tue Jul 5 07:48:33 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 5 Jul 2011 07:48:33 -0700 Subject: Comment sts SNF 2011-06-09 16:33:48: Chamber has reched 4.38um Message-ID: Thanks From jperez at snf.stanford.edu Tue Jul 5 07:51:08 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 5 Jul 2011 07:51:08 -0700 Subject: Problem sts SNF 2011-07-01 12:57:14: system won't go to standby Message-ID: This comment for Drytek 4. From jperez at snf.stanford.edu Tue Jul 5 07:51:27 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 5 Jul 2011 07:51:27 -0700 Subject: Problem sts SNF 2011-07-01 13:02:56: Ignore my previous problem its for Drytek4 Message-ID: wrong equipment pass down. From jperez at snf.stanford.edu Thu Jul 7 07:25:17 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 7 Jul 2011 07:25:17 -0700 Subject: Problem sts SNF 2011-06-24 01:35:08: Silane gas flow error Message-ID: Switched to fuller silane bottle. From jperez at snf.stanford.edu Thu Jul 7 07:26:35 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 7 Jul 2011 07:26:35 -0700 Subject: Comment sts SNF 2011-06-24 11:45:50: Silane purged 1.5 + 10 minutes Message-ID: checking silane flow and OK now.to use. From jperez at snf.stanford.edu Thu Jul 7 07:28:43 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 7 Jul 2011 07:28:43 -0700 Subject: Comment sts SNF 2011-07-01 09:22:32: Base Pressure Message-ID: Will bounce around. Not an issue. From jperez at snf.stanford.edu Thu Jul 7 07:29:22 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 7 Jul 2011 07:29:22 -0700 Subject: Comment sts SNF 2011-06-28 10:01:08: Cleaning process found aborted Message-ID: Ok to use. From jperez at snf.stanford.edu Thu Jul 7 07:30:31 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 7 Jul 2011 07:30:31 -0700 Subject: Problem sts SNF 2011-06-27 10:46:02: venting is very slow Message-ID: Need more information on what you think is normal and what is too long or longer. From jperez at snf.stanford.edu Thu Jul 7 07:32:18 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 7 Jul 2011 07:32:18 -0700 Subject: Comment sts SNF 2011-06-06 11:20:08: Nitride dep Message-ID: When running nitride with my standard recipe, did not see this problem. From vijayn at snf.stanford.edu Thu Jul 14 21:26:39 2011 From: vijayn at snf.stanford.edu (vijayn at snf.stanford.edu) Date: Thu, 14 Jul 2011 21:26:39 -0700 Subject: Problem sts SNF 2011-07-14 21:26:39: Process nitrogen line overpressure trip Message-ID: Gas flow erratic... No flow then too much. Large hissing sound, overpressure trip, then chamber pressure read 2044 mTorr. Perhaps something wrong with flow controller or clog in the line? Please call me at 650-453-8564 and I can explain. -Vijay From jhaydon at snf.stanford.edu Mon Jul 18 08:28:33 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 18 Jul 2011 08:28:33 -0700 Subject: Problem sts SNF 2011-07-14 21:26:39: Process nitrogen line overpressure trip Message-ID: stuck valve From jasonlin at snf.stanford.edu Wed Jul 27 23:05:07 2011 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Wed, 27 Jul 2011 23:05:07 -0700 Subject: Comment sts SNF 2011-07-27 23:05:06: Operating manual missing Message-ID: The operating manual usually by the computer is missing. There's still a copy inside the log book binder.