Problem sts SNF 2011-06-24 01:35:08: Silane gas flow error

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Jul 7 07:25:17 PDT 2011

Previous message: Comment sts SNF 2011-06-09 16:33:48: Chamber has reched 4.38um
Next message: Comment sts SNF 2011-06-24 11:45:50: Silane purged 1.5 + 10 minutes
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Switched to fuller silane bottle.

Previous message: Comment sts SNF 2011-06-09 16:33:48: Chamber has reched 4.38um
Next message: Comment sts SNF 2011-06-24 11:45:50: Silane purged 1.5 + 10 minutes
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the sts-pcs mailing list