Problem sts SNF 2011-07-14 21:26:39: Process nitrogen line overpressure trip

vijayn at snf.stanford.edu vijayn at snf.stanford.edu
Thu Jul 14 21:26:39 PDT 2011


Gas flow erratic...  No flow then too much.  Large hissing sound, overpressure trip, then chamber pressure read 2044 mTorr.  Perhaps something wrong with flow controller or clog in the line?  Please call me at 650-453-8564 and I can explain.  -Vijay




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