From jperez at snf.stanford.edu  Fri Jun  3 07:38:54 2011
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 3 Jun 2011 07:38:54 -0700
Subject: Shutdown sts SNF 2011-06-03 07:38:53: Reconnecting Nitrogen Process line to STS
Message-ID: <mailman.1371.1357938614.25857.sts-pcs@snf.stanford.edu>




From jperez at snf.stanford.edu  Fri Jun  3 13:42:16 2011
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Fri, 3 Jun 2011 13:42:16 -0700
Subject: Shutdown sts SNF 2011-06-03 07:38:53: Reconnecting Nitrogen Process line to STS
Message-ID: <mailman.1372.1357938614.25857.sts-pcs@snf.stanford.edu>

C Nitrogen has been connected to STS. This is an additional line of 
Nitrogen. 



From usha at snf.stanford.edu  Mon Jun  6 11:20:09 2011
From: usha at snf.stanford.edu (usha at snf.stanford.edu)
Date: Mon, 6 Jun 2011 11:20:09 -0700
Subject: Comment sts SNF 2011-06-06 11:20:08: Nitride dep
Message-ID: <mailman.1373.1357938614.25857.sts-pcs@snf.stanford.edu>

High rfelcted power during the first few minute of dep for hi-freq power then drops down to 0W



From faridz at snf.stanford.edu  Thu Jun  9 16:33:49 2011
From: faridz at snf.stanford.edu (faridz at snf.stanford.edu)
Date: Thu, 9 Jun 2011 16:33:49 -0700
Subject: Comment sts SNF 2011-06-09 16:33:48: Chamber has reched 4.38um 
Message-ID: <mailman.1374.1357938614.25857.sts-pcs@snf.stanford.edu>

I used low temp SiO2 Deposition, Chamber also reched 4.38um. I started cleaning cycle under community service. Please follow up with next step of cleaning. 



From dwnam at snf.stanford.edu  Fri Jun 24 01:35:09 2011
From: dwnam at snf.stanford.edu (dwnam at snf.stanford.edu)
Date: Fri, 24 Jun 2011 01:35:09 -0700
Subject: Problem sts SNF 2011-06-24 01:35:08: Silane gas flow error
Message-ID: <mailman.1375.1357938614.25857.sts-pcs@snf.stanford.edu>

It keeps giving me the error of Silane gas flow.
It is supposed to be around 2000sccm for high freq nit deposition
but it drops down to 1000sccm after 1 min of deposition.



From jimkruger at snf.stanford.edu  Fri Jun 24 11:45:50 2011
From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu)
Date: Fri, 24 Jun 2011 11:45:50 -0700
Subject: Comment sts SNF 2011-06-24 11:45:50: Silane purged 1.5 + 10 minutes
Message-ID: <mailman.1376.1357938614.25857.sts-pcs@snf.stanford.edu>

at ~ 2000 sccm  per Jim H.



From wslee at snf.stanford.edu  Mon Jun 27 10:46:02 2011
From: wslee at snf.stanford.edu (wslee at snf.stanford.edu)
Date: Mon, 27 Jun 2011 10:46:02 -0700
Subject: Problem sts SNF 2011-06-27 10:46:02: venting is very slow
Message-ID: <mailman.1377.1357938614.25857.sts-pcs@snf.stanford.edu>

venting time seems much longer than normal



From tomada at snf.stanford.edu  Tue Jun 28 10:01:09 2011
From: tomada at snf.stanford.edu (tomada at snf.stanford.edu)
Date: Tue, 28 Jun 2011 10:01:09 -0700
Subject: Comment sts SNF 2011-06-28 10:01:08: Cleaning process found aborted
Message-ID: <mailman.1378.1357938614.25857.sts-pcs@snf.stanford.edu>

There was agas pressure error when I got to the machine. After aborting few times now the side walls cleaning is going again.