Comment sts SNF 2011-06-09 16:33:48: Chamber has reched 4.38um

faridz at faridz at
Thu Jun 9 16:33:49 PDT 2011

I used low temp SiO2 Deposition, Chamber also reched 4.38um. I started cleaning cycle under community service. Please follow up with next step of cleaning. 

More information about the sts-pcs mailing list