Comment sts SNF 2011-06-09 16:33:48: Chamber has reched 4.38um

faridz at snf.stanford.edu faridz at snf.stanford.edu
Thu Jun 9 16:33:49 PDT 2011


I used low temp SiO2 Deposition, Chamber also reched 4.38um. I started cleaning cycle under community service. Please follow up with next step of cleaning. 




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