Problem sts SNF 2011-06-24 01:35:08: Silane gas flow error

dwnam at snf.stanford.edu dwnam at snf.stanford.edu
Fri Jun 24 01:35:09 PDT 2011


It keeps giving me the error of Silane gas flow.
It is supposed to be around 2000sccm for high freq nit deposition
but it drops down to 1000sccm after 1 min of deposition.




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