Comment sts SNF 2011-06-24 11:45:50: Silane purged 1.5 + 10 minutes
jimkruger at snf.stanford.edu
jimkruger at snf.stanford.edu
Fri Jun 24 11:45:50 PDT 2011
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Problem sts SNF 2011-06-24 01:35:08: Silane gas flow error
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Problem sts SNF 2011-06-27 10:46:02: venting is very slow
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at ~ 2000 sccm per Jim H.
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Problem sts SNF 2011-06-24 01:35:08: Silane gas flow error
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Problem sts SNF 2011-06-27 10:46:02: venting is very slow
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