From altamash at snf.stanford.edu  Sun Mar 20 13:23:42 2011
From: altamash at snf.stanford.edu (altamash at snf.stanford.edu)
Date: Sun, 20 Mar 2011 13:23:42 -0700
Subject: Problem sts SNF 2011-03-20 13:23:41: SIlane flow error
Message-ID: <mailman.1339.1357938614.25857.sts-pcs@snf.stanford.edu>

Nitride deposition not possible. Maybe linked to the dichlorosilane shutdown but not sure.



From mdickey at snf.stanford.edu  Mon Mar 21 06:48:59 2011
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Mon, 21 Mar 2011 06:48:59 -0700
Subject: Problem sts SNF 2011-03-20 13:23:41: SIlane flow error
Message-ID: <mailman.1340.1357938614.25857.sts-pcs@snf.stanford.edu>

Gas has been swtiched to bottle A