From ehe at snf.stanford.edu Mon May 2 12:55:34 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Mon, 2 May 2011 12:55:34 -0700 Subject: Comment sts SNF 2011-05-02 12:55:33: timeline? Message-ID: What is the timeline for fixing the PECVD? From jperez at snf.stanford.edu Tue May 3 09:14:16 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 May 2011 09:14:16 -0700 Subject: Comment sts SNF 2011-05-03 09:14:15: Running Clean Cycle and then Testing Message-ID: Will test both frequencies today. We should know if STS PECVD is up by 3PM 5/3/11 From jperez at snf.stanford.edu Tue May 3 15:22:39 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 May 2011 15:22:39 -0700 Subject: Comment sts SNF 2011-05-02 12:55:33: timeline? Message-ID: up! From jperez at snf.stanford.edu Tue May 3 15:23:33 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 May 2011 15:23:33 -0700 Subject: Comment sts SNF 2011-05-03 09:14:15: Running Clean Cycle and then Testing Message-ID: Clean cycle done. Run Oxide low and high frequency tests and were good. See logbook. From jperez at snf.stanford.edu Tue May 3 15:24:36 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 May 2011 15:24:36 -0700 Subject: Shutdown sts SNF 2011-04-21 07:47:10: Can NOT Clean (ETCHBak3) due to low freq. Message-ID: System has been repaired with a new contactor and both low and high frequencies has been tested with an oxide film. From jperez at snf.stanford.edu Tue May 3 15:24:57 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 May 2011 15:24:57 -0700 Subject: Problem sts SNF 2011-04-20 23:17:28: Clean cycle aborted Message-ID: Clean cycle completed. From jperez at snf.stanford.edu Tue May 3 15:25:33 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 May 2011 15:25:33 -0700 Subject: Problem sts SNF 2011-04-20 15:39:35: low frequency problem Message-ID: System has been repaired and OK to use. From jperez at snf.stanford.edu Tue May 3 15:26:26 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 May 2011 15:26:26 -0700 Subject: Comment sts SNF 2011-04-20 14:40:53: SYSTEM DOWN Message-ID: Contactor replaced and is back up. oxide tests are done and OK to use. From jperez at snf.stanford.edu Tue May 3 15:27:11 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 May 2011 15:27:11 -0700 Subject: Problem sts SNF 2011-04-18 11:19:11: Low Frequency isn't working, so no NITRIDES to be ran Message-ID: OK to use, but test nitride before committing your wafers. From jperez at snf.stanford.edu Tue May 3 15:27:55 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 May 2011 15:27:55 -0700 Subject: Problem sts SNF 2011-04-17 05:20:54: RF2 power error Message-ID: System has be fixed with new contactor. Low freqency working. From faridz at snf.stanford.edu Tue May 3 16:37:02 2011 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Tue, 3 May 2011 16:37:02 -0700 Subject: Comment sts SNF 2011-05-03 16:37:01: too manu flakes ! Message-ID: Too manu flakes fallinmg on the wafers, starting clean cycle. Please continue. From faridz at snf.stanford.edu Tue May 3 16:37:59 2011 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Tue, 3 May 2011 16:37:59 -0700 Subject: Comment sts SNF 2011-05-03 16:37:58: Too Many flakes (Particles) Message-ID: From calarrudo at snf.stanford.edu Tue May 3 22:40:24 2011 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Tue, 3 May 2011 22:40:24 -0700 Subject: Problem sts SNF 2011-05-03 22:40:23: STS Dep particles Message-ID: After Jeannie's clean, and Farid's clean the STS is still generating a lot of particles on the wafers. From zzp at snf.stanford.edu Thu May 5 08:52:05 2011 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Thu, 5 May 2011 08:52:05 -0700 Subject: Problem sts SNF 2011-05-05 08:52:04: clean cycle delayed Message-ID: some gas error occurred during etchbak3 step. Jeannie has noticed that and she will start the clean again after the gas bottle is changed. From jperez at snf.stanford.edu Fri May 6 08:50:45 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 6 May 2011 08:50:45 -0700 Subject: Problem sts SNF 2011-05-05 08:52:04: clean cycle delayed Message-ID: Restarted full clean and completed. From jperez at snf.stanford.edu Fri May 6 12:04:42 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 6 May 2011 12:04:42 -0700 Subject: Problem sts SNF 2011-05-03 22:40:23: STS Dep particles Message-ID: Re did full cycle of clean. Ran first particle test.and was good. see data in log book. From jperez at snf.stanford.edu Fri May 6 14:19:41 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 6 May 2011 14:19:41 -0700 Subject: Comment sts SNF 2011-05-03 16:37:58: Too Many flakes (Particles) Message-ID: flakes are gone after a full cycle clean done on 5/6/2011. Ran a low frequency test and saw no flakes.TW ran through the Tencor particle scanner and only added 66 particles. From this equipment. Previous test before the partcles after Temperature was lowered, also looked good. Best thing is to check chamber before use or/ and take a test. From jperez at snf.stanford.edu Fri May 6 14:22:13 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 6 May 2011 14:22:13 -0700 Subject: Comment sts SNF 2011-05-03 16:37:01: too manu flakes ! Message-ID: After another clean saw no flakes and only added 66 particles smaller then 2.56 um. From jimkruger at snf.stanford.edu Wed May 25 10:04:44 2011 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 25 May 2011 10:04:44 -0700 Subject: Shutdown sts SNF 2011-05-25 10:04:44: Burned out contactor coil Message-ID: Jim Haydon is on the problem. From jhaydon at snf.stanford.edu Wed May 25 15:33:41 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 25 May 2011 15:33:41 -0700 Subject: Shutdown sts SNF 2011-05-25 10:04:44: Burned out contactor coil Message-ID: replaced contactor and fixed stuck (ON) switch