Comment sts SNF 2011-05-03 16:37:58: Too Many flakes (Particles)

jperez at snf.stanford.edu jperez at snf.stanford.edu
Fri May 6 14:19:41 PDT 2011


flakes are gone after a full cycle clean done on 5/6/2011. Ran 
a low frequency test and saw no flakes.TW ran through the 
Tencor particle scanner and only added 66 particles. From this 
equipment. 
Previous test before the partcles after Temperature was lowered, also
looked good. Best thing is to check chamber before use or/ and take a 
test.




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