Problem sts SNF 2011-11-04 14:39:49: dirty chamber and lid closes jarringly

wslee at snf.stanford.edu wslee at snf.stanford.edu
Fri Nov 4 14:39:52 PDT 2011


The chamber is an orangish color and the top of the lid looks dirtier than normal for the chamber dep thickness. The current chamber dep thickness is about 2.2um.
Also, the lid closes very sharply with a lot of motion even with the rapid button pushing technique. It almost seems like the lid is coming loose or something. The lid motion deposited some particles on my wafer.




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