Shutdown sts SNF 2011-11-16 21:28:27: perge Gas flow fault - Shut down

clee58 at clee58 at
Wed Nov 16 21:28:27 PST 2011

When I ran the recipe, it said "2% silane error", and when I retried to run, and it said "perge gas flow fault". No keyboard working now. 
I shut it down while my samples are still inside chamber. Please take my samples out and put them in the boxes placed on the Al foil. 

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