From tberg at snf.stanford.edu Wed Oct 19 06:21:13 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 19 Oct 2011 06:21:13 -0700 Subject: Shutdown sts SNF 2011-10-19 06:21:12: Shutdown for gas tie in Message-ID: From tberg at snf.stanford.edu Wed Oct 19 14:15:19 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 19 Oct 2011 14:15:19 -0700 Subject: Shutdown sts SNF 2011-10-19 06:21:12: Shutdown for gas tie in Message-ID: gas line tied in. Needs test From tberg at snf.stanford.edu Wed Oct 19 14:15:49 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 19 Oct 2011 14:15:49 -0700 Subject: Problem sts SNF 2011-10-19 14:15:48: Needsd test after gas line tie in Message-ID: gas line tied in. Needs test From jperez at snf.stanford.edu Wed Oct 19 14:51:35 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 19 Oct 2011 14:51:35 -0700 Subject: Problem sts SNF 2011-10-19 14:15:48: Needsd test after gas line tie in Message-ID: Ran two test wafers (front and back) on platen. Saw NO hot spots, no arcing, color purple plasma. What color puralish /blue. From jperez at snf.stanford.edu Wed Oct 19 15:05:02 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 19 Oct 2011 15:05:02 -0700 Subject: Comment sts SNF 2011-09-28 11:57:51: in clean cycle Message-ID: Clean cycle completed From jperez at snf.stanford.edu Wed Oct 19 15:05:28 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 19 Oct 2011 15:05:28 -0700 Subject: Comment sts SNF 2011-09-22 12:28:22: chamber reached 4.1 um clean start. Message-ID: Clean cycle completed From jperez at snf.stanford.edu Wed Oct 19 15:08:44 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 19 Oct 2011 15:08:44 -0700 Subject: Comment sts SNF 2011-10-19 15:08:43: Test wafers (2) good Message-ID: Back tw 406A/min Avg. thickness 1044, IR 1.475 Front tw 413A /min Avg thickness 1062, IR 1.48739 See log book to review data From mdickey at snf.stanford.edu Tue Oct 25 05:48:52 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 25 Oct 2011 05:48:52 -0700 Subject: Shutdown sts SNF 2011-10-25 05:48:52: Ammonia Message-ID: Ammonia appears to be empty From mdickey at snf.stanford.edu Tue Oct 25 06:09:53 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 25 Oct 2011 06:09:53 -0700 Subject: Shutdown sts SNF 2011-10-25 05:48:52: Ammonia Message-ID: No ammonia available at the moment From mdickey at snf.stanford.edu Tue Oct 25 06:10:31 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 25 Oct 2011 06:10:31 -0700 Subject: Problem sts SNF 2011-10-25 06:10:30: ammonia Message-ID: No ammonia available From seymour at snf.stanford.edu Fri Oct 28 08:01:19 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 28 Oct 2011 08:01:19 -0700 Subject: Problem sts SNF 2011-10-25 06:10:30: ammonia Message-ID: ammonia cylinder changed and leak check passed. From seymour at snf.stanford.edu Fri Oct 28 08:01:57 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 28 Oct 2011 08:01:57 -0700 Subject: Problem sts SNF 2011-10-28 08:01:56: needs nitride test after ammonia cylinder change Message-ID: From jperez at snf.stanford.edu Fri Oct 28 10:29:27 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 28 Oct 2011 10:29:27 -0700 Subject: Problem sts SNF 2011-10-28 08:01:56: needs nitride test after ammonia cylinder change Message-ID: 2Test wfrs good, dep rate 94.5angstroms /minute and 94A/min