From jperez at snf.stanford.edu Fri Sep 2 05:43:18 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 2 Sep 2011 05:43:18 -0700 Subject: Comment sts SNF 2011-08-26 21:14:45: I found the Ar purge valve OFF Message-ID: OK to use. No oli backfill From jperez at snf.stanford.edu Fri Sep 2 05:43:30 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 2 Sep 2011 05:43:30 -0700 Subject: Comment sts SNF 2011-08-26 22:52:18: O2 Descum performed Message-ID: OK to use. From ntayebi at snf.stanford.edu Wed Sep 7 14:29:36 2011 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Wed, 7 Sep 2011 14:29:36 -0700 Subject: Problem sts SNF 2011-09-07 14:29:35: Pressure Tolerance Error Message-ID: I'm getting a pressure tolerance error and I'm not able to start any of the depositions. Tried various recipes but same problem. From jperez at snf.stanford.edu Thu Sep 8 09:41:52 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 8 Sep 2011 09:41:52 -0700 Subject: Problem sts SNF 2011-09-07 14:29:35: Pressure Tolerance Error Message-ID: The Nitrogen flow had been moved (too low or too much). Please do NOT adjust Nitrogen flow that is next to the Argon toggle. From chienyuc at snf.stanford.edu Fri Sep 16 23:30:59 2011 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Fri, 16 Sep 2011 23:30:59 -0700 Subject: Comment sts SNF 2011-09-16 23:30:58: ok to use now Message-ID: Found left at venting and could not open. Restarted the program and retrieved the wafers inside, and then did a nitride deposition normally as expected thickness. From jperez at snf.stanford.edu Tue Sep 20 14:56:47 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 20 Sep 2011 14:56:47 -0700 Subject: Comment sts SNF 2011-09-16 23:30:58: ok to use now Message-ID: Jim worked on the filter to help see if it would solve the slow venting of the Chamber and it did compare to yesterdays test. It took over five minutes to see the decompression and today it looked much better after 3 minutes. From faridz at snf.stanford.edu Thu Sep 22 12:28:22 2011 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Thu, 22 Sep 2011 12:28:22 -0700 Subject: Comment sts SNF 2011-09-22 12:28:22: chamber reached 4.1 um clean start. Message-ID: clean start under community service. From altamash at snf.stanford.edu Wed Sep 28 11:57:51 2011 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Wed, 28 Sep 2011 11:57:51 -0700 Subject: Comment sts SNF 2011-09-28 11:57:51: in clean cycle Message-ID: