Comment sts SNF 2011-09-16 23:30:58: ok to use now
chienyuc at snf.stanford.edu
chienyuc at snf.stanford.edu
Fri Sep 16 23:30:59 PDT 2011
Found left at venting and could not open. Restarted the program and retrieved the wafers inside, and then did a nitride deposition normally as expected thickness.
More information about the sts-pcs
mailing list