Comment sts SNF 2011-09-16 23:30:58: ok to use now

chienyuc at snf.stanford.edu chienyuc at snf.stanford.edu
Fri Sep 16 23:30:59 PDT 2011


Found left at venting and could not open.  Restarted the program and retrieved the wafers inside, and then did a nitride deposition normally as expected thickness.




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